Hae-Do Jeong

Pusan National University · Mechanical Engineering

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Professor

Prof. 정해도

About

부산대학교 기계공학부 정밀가공시스템 전공 교수로 CMP 실험실을 운영한다. 반도체·전자소자 제조에 필수적인 화학기계적 평탄화(CMP) 공정의 이론·실용 연구를 선도하며, 지능형 압력 패드 개발, 대면적 Roll CMP 장비, 전기화학기계적 연마(ECMP), CMP 모니터링·측정장비, CMP 시뮬레이션·모델링 등을 연구한다.

Research keywords

지능형제조시스템

Selected publications

Prediction of CMP Material Removal Rate based on Pad Surface Roughness Using Deep Neural NetworkJournal of the Korean Society for Precision Engineering · 2023
Evaluation of Cutting Ability of Electroplated Diamond Wire Using a Test System and Theoretical ApproachInternational Journal of Precision Engineering and Manufacturing · 2018
Effects of pad properties on material removal in chemical mechanical polishingJournal of Materials Processing Technology · 2007
Functional prototype development of multi-layer board (MLB) using rapid prototyping technologyJournal of Materials Processing Technology · 2007
A study on the chemical mechanical micro-machining (C3M) process and its applicationJournal of Materials Processing Technology · 2002

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