Advanced Micro/Nanomanufacturing Lab
Advanced Micro/Nanomanufacturing Lab
KAIST · Mechanical Engineering
Professor
Prof. 이정철
Professor's page · publicationsAbout
KAIST 기계공학과 이정철 교수의 MNIL(Micro & Nano Integration Laboratory)은 반도체 소재·부품·장비 분야의 기계공학적 솔루션을 연구한다. 마이크로/나노 제조 및 센싱 기술을 중심으로 공진형 센서, 마이크로채널 시스템, 반도체 박막-캐비티 구조, 액체금속·유연소자, 기능성 표면, 열관리 기술 등 초소형 센서 플랫폼부터 반도체 공정·나노 계면 분석·산업 및 바이오 응용까지 폭넓은 융합 연구를 수행한다.
Research keywords
Selected publications
- Wafer-scale deterministic fabrication of axis-ratio–engineered silicon nanoparticlesSmall · 2026
- In-Situ Monitoring of Diffusive Morphology TransformationACS Applied Materials & Interfaces · 2026
- Enhancing In-Plane Thermal Conductivity of Ag and Au FilmsACS Photonics · 2026
- CuOx-Based Transparent and Flexible Humidity SensorsApplied Surface Science Advances · 2026
- Extracting Liquid Thermophysical Properties Inside Stainless-Steel Microtubes Using the 3ω MethodMicro and Nano Systems Letters · 2025
- Inertial sensing of water content in tumor spheroidsScience Advances · 2026
Other labs in this department
- Human-Robot Interaction LabRecruiting
Ki-Uk Kyung
Soft Robotics, Human-Robot Interaction, Flexible actuators & sensors, Haptics
- Exoskeleton LabRecruiting
Kyoungchul Kong
Robust control systems, Human assistive robotics, Design and control of legged robots
- Smart Materials & Energy LabRecruiting
Miso Kim
Mechanical metamaterials, Piezoelectrics and dielectrics, Energy harvesting/Sensor/MLCC, Additive manufacturing
- Advanced Manufacturing LabRecruiting
Sanha Kim
Manufacturing Process Mechanics, Device Planarization & Integration, Functional Surface Architecturing, Digital Production Technologies
- Environmental Fluid Mechanics LabRecruiting
Sung Yong Kim
Environmental fluid dynamics, Air-sea and air-sea-land interaction processes, Environmental sensing
- Ultra-Precision Metrology LabRecruiting
Young-Jin Kim
Precision Metrology, Ultrafast Photonics, Non-Destructive Testing, Direct Laser Writing, Flexible/Stretchable Electro-Optics