Soo-Hyun Kim
Soo-Hyun Kim
Ulsan National Institute of Science and Technology (UNIST) · Materials Science and Engineering
Professor
Prof. 김수현
Professor's page · publicationsAbout
김수현 교수 연구실(나노소자공정연구실)은 UNIST 신소재공학과 소속으로, 원자층 증착법(ALD)과 영역선택 원자층 증착법을 연구한다. 반도체 배선공정과 전구체 개발을 통해 나노소자 공정 기술을 탐구한다.
Research keywords
Recent papers
- Highly conductive and conformal InN by plasma-enhanced atomic layer deposition on amorphous SiO2 substrate using a liquid heteroleptic indium precursor and NH3 plasmaJournal of Alloys and Compounds · Oct 1
- Inherent area-selective atomic layer deposition of ZnO films on SiO2 over metals as non-growth substratesApplied Surface Science · Aug 31
From OpenAlex · papers whose author affiliation matches this university
Labs doing related research
Labs that recently published on topics this lab's recent papers share
Shared topic: Semiconductor materials and devices
Jin-Seong Park
Hanyang University · Materials Science and Engineering
High-Pressure Deuterium Annealing Enables Robust Trap Passivation in ALD HfO2/Si MOS Capacitors under High-Temperature Bias StressACS Applied Electronic Materials · Oct 3Hwang, Cheol Seong
Seoul National University · Materials Science and Engineering
Three-dimensional dynamic random-access memory beyond two-dimensional scaling limitsNewNature Reviews Electrical Engineering · Oct 23고대홍 교수 연구실
Yonsei University · Materials Science and Engineering
Selective chemical wet etching of B-doped Si0.8Ge0.2 epitaxial layers for multistacked memory devicesMaterials Science in Semiconductor Processing · Aug 30
Other labs in this department
- Yang Jeong ParkRecruiting
Advanced Scientific Computing, Autonomous Laboratory, AI for Materials
- Ju-Young Kim
나노역학, 반도체 첨단 패키징, 신축 소자 신뢰성
- Jiyun Kim
Programmable matter, Robotics, 4D Printing, Metamaterial
- Jinhyun Kim
Electrochemical materials/devices, photoelectrochemical materials/devices, photochemical materials/devices, nano catalysts, microbial electrosynthesis, carbon neutrality, waste valorization
- Sung Soo Park
합금 설계, 가공 기술, 멀티 스케일 재료 분석, 금속 기반 생체 재료
- Myounghoon Song
페로브스카이트/유기기반광전자소자, 광결정, 플렉시블소자