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Yo-Sep Min

Yo-Sep Min

Konkuk University · Chemical Engineering

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Professor

About

민요셉 교수 연구실(Yo-Sep Min Lab)은 건국대 화학공학과 소속으로, 원자층증착(ALD)을 활용해 전자·에너지 소자용 기능성 박막 소재를 합성하는 연구를 한다. 다양한 박막의 증착 메커니즘을 규명하기 위한 ALD 공정의 in-situ 분석도 수행한다.

Research keywords

atomic layer deposition

Recent papers

From OpenAlex · papers whose author affiliation matches this university

Selected publications

  • Origin of instability of titanicone grown by molecular layer deposition using TiCl4 and ethylene glycolChemistry of Materials · 2024
  • Pyridine-catalyzed atomic layer deposition of SiO2 from hexachlorodisilane and water: an in situ mechanistic studyChemistry of Materials · 2023
  • Mechanistic study on molecular layer deposition of titanicone from TiCl4 and ethylene glycolJournal of Physical Chemistry C · 2023
  • Mechanistic mapping of ozone-dosed Al2O3 atomic layer deposition half-cyclesIndustrial & Engineering Chemistry Research · 2022
  • Investigation of abnormally high growth-per-cycle in atomic layer deposition of Al2O3 using trimethylaluminum and waterApplied Surface Science · 2022
  • Chemical probing of water-stable methyl species in atomic layer deposition of Al2O3 from trimethylaluminum and waterJournal of Physical Chemistry C · 2021

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Shared topic: Semiconductor materials and devices

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