Lab directory
Nano Device Laboratory
Nano Device Laboratory
Yonsei University · Chemical and Biomolecular Engineering
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Professor
Prof. 임상우
Professor's page · publicationsAbout
임상우 교수 연구실(Nano Device Laboratory, NDL)은 연세대 화공생명공학부 소속으로, 반도체 소재와 공정, 특히 식각의 반응 메커니즘·속도론·표면 특성을 연구한다. 차세대 트랜지스터를 위한 SiGe 선택적 식각, III-V 반도체 세정, IGZO 습식 식각, GAA 트랜지스터 집적, 에너지 하베스팅 등을 다룬다.
Research keywords
SemiconductorSurfaceThin filmNano-device
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