Lab directory
Environmental Nanomaterials Laboratory
Environmental Nanomaterials Laboratory
Chungnam National University · Materials Science and Engineering
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Professor
Prof. 전나리
Professor's page · publicationsAbout
환경 응용을 위한 나노소재를 연구하는 나노환경재료 연구실입니다.
Research keywords
나노소재/박막 공정 (원자층증착·순차침투합성반도체 소재)
Selected publications
- Atomic InOx Motif-Mediated Cross-linking in PMMA via Sequential Infiltration Synthesis for Negative-Tone LithographyApplied Surface Science Advances · 2026
- Machine Learning-Enabled In-Situ Diagnostics for Intelligent Plasma-Based Semiconductor Manufacturing: A ReviewACS Applied Materials & Interfaces · 2026
- Atomic Layer Etching of HfO2 and ZrO2 Using NbF5 and TiCl4 in High-Aspect-Ratio 3D Nanohole StructuresChemistry of Materials · 2026
- Metal/metal-oxide heterostructured nanoparticle arrays via block copolymer nanopatterningJournal of Materials Chemistry A · 2026
- MoNx Nanoscale-Thick Films Using BTBMMo and Ammonia in Plasma-Enhanced ALD for Cu Diffusion Barriers in High-Aspect-Ratio Nanohole 3D InterconnectsACS Applied Nano Materials · 2025
- Transient, Reusable Top-Coats for the Vertical Orientation of High-χ Block Copolymers for NanopatterningACS Applied Nano Materials · 2023
Other labs in this department
- Advanced Materials and Energy Catalysis Lab (AMEC)
Sang-Joon Kim
나노재료/에너지촉매
- Nano Semiconductors Lab.
Eui-Tae Kim
재료공학
- Computational Materials Science Lab.
Kim, Hyun You
Computational materials science: DFT-based rational design of catalytic, energy, and functional materials (single-atom catalysts, metal-oxide interfaces, CO2 conversion)
- Energy Materials & Interfaces Laboratory
Sangbaek Park
에너지재료/계면공학
- Advanced Structural Materials & Processing Lab. (ASMPL)
Dong-Hyun Lee
Process-microstructure-property relationships in advanced structural metals and alloys (nanocrystalline alloys, high-entropy alloys, additively manufactured metals, hydrogen embrittlement)
- Mechanical Metallurgy and Neutron Application Lab.
Soo Yeol Lee
금속재료